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CIK 0001113232 · Large accelerated filer

AXCELIS TECHNOLOGIES INC

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Ticker
ACLS
Exchange
Nasdaq
Industry
Special Industry Machinery, NEC
FY end
Dec 31
Incorporated
DE
Entity type
operating
EIN
341818596
Phone
978-787-4000
Business address
108 CHERRY HILL DRIVE, BEVERLY, MA, 01915
  1. SCHEDULE 13G/A Stake Statement of Beneficial Ownership
  2. SCHEDULE 13G/A Stake Statement of Beneficial Ownership
  3. SCHEDULE 13G/A Stake Statement of Beneficial Ownership
  4. SCHEDULE 13G/A Stake Statement of Beneficial Ownership
  5. SCHEDULE 13G Stake Statement of Beneficial Ownership
  6. SCHEDULE 13G Stake Statement of Beneficial Ownership
  7. SCHEDULE 13G Stake Statement of Beneficial Ownership
  8. DEF 14A Proxy Proxy Statement
  9. SCHEDULE 13G/A Stake Statement of Beneficial Ownership
  10. SCHEDULE 13G Stake Statement of Beneficial Ownership
  11. SCHEDULE 13G/A Stake Statement of Beneficial Ownership
  12. SCHEDULE 13G Stake Statement of Beneficial Ownership
  13. SCHEDULE 13G/A Stake Statement of Beneficial Ownership
  14. DEF 14A Proxy Proxy Statement
  15. SCHEDULE 13G/A Stake Statement of Beneficial Ownership
  16. SC 13G/A Stake Amended Statement of Ownership
  17. SC 13G/A Stake Amended Statement of Ownership
  18. DEF 14A Proxy Proxy Statement
  19. SC 13G/A Stake Amended Statement of Ownership
  20. SC 13G/A Stake Amended Statement of Ownership

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