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DEF 14A

Proxy Statement

AXCELIS TECHNOLOGIES INC Filed 2024-03-29 Acc 0001104659-24-040855

Documents 1

DEF 14A Proxy Statement , tm242686-d4_def14a.htm

Around this filing

2025-03-31 DEF 14A Proxy Statement
2024-03-29 ARS Annual Report to Security Holders
2024-03-29 DEF 14A Proxy Statement
2023-03-31 DEF 14A Proxy Statement

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