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DEF 14A

Proxy Statement

AXCELIS TECHNOLOGIES INC Filed 2023-03-31 Acc 0001104659-23-039635

Documents 1

DEF 14A Proxy Statement , tm231852d2_def14a.htm

Around this filing

2024-03-29 DEF 14A Proxy Statement
2023-03-31 ARS Annual Report to Security Holders
2023-03-31 DEF 14A Proxy Statement
2022-03-30 DEF 14A Proxy Statement

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