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DEF 14A

Proxy Statement

AXCELIS TECHNOLOGIES INC Filed 2025-03-31 Acc 0001104659-25-029630

Documents 1

DEF 14A Proxy Statement , tm252354-2_def14a.htm

Around this filing

2026-03-31 DEF 14A Proxy Statement
2025-03-31 ARS Annual Report to Security Holders
2025-03-31 DEF 14A Proxy Statement
2024-03-29 DEF 14A Proxy Statement

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