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SCHEDULE 13G/A

Statement of Beneficial Ownership

AXCELIS TECHNOLOGIES INC Filed 2026-11-05 Acc 0000315066-26-002697

Documents 1

SCHEDULE 13G/A Statement of Beneficial Ownership , xslSCHEDULE_13G_X02/primary_doc.xml

Around this filing

2026-11-12 3 Initial Statement of Ownership
2026-11-05 10-Q Quarterly Report
2026-11-05 8-K Results of operations
2026-11-05 SCHEDULE 13G/A Statement of Beneficial Ownership
2026-11-02 425 Prospectus/Communication re Business Combination
2026-11-02 8-K Regulation FD disclosure · Other events
2026-08-06 SCHEDULE 13G/A Statement of Beneficial Ownership

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