SCHEDULE 13G

Statement of Beneficial Ownership

AXCELIS TECHNOLOGIES INC Filed 2025-08-14 Acc 0000052388-25-000182

Documents 1

SCHEDULE 13G Statement of Beneficial Ownership , xslSCHEDULE_13G_X01/primary_doc.xml

Around this filing

2026-02-12 SCHEDULE 13G Statement of Beneficial Ownership
2025-08-14 SCHEDULE 13G Statement of Beneficial Ownership

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External

SEC EDGAR (opens in new tab)