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SCHEDULE 13G

Statement of Beneficial Ownership

AXCELIS TECHNOLOGIES INC Filed 2026-02-12 Acc 0001080298-26-000004

Documents 1

SCHEDULE 13G Statement of Beneficial Ownership , xslSCHEDULE_13G_X01/primary_doc.xml

Around this filing

2026-04-28 SCHEDULE 13G Statement of Beneficial Ownership
2026-02-17 8-K Results of operations
2026-02-12 425 Prospectus/Communication re Business Combination
2026-02-12 SCHEDULE 13G Statement of Beneficial Ownership
2026-02-06 425 Prospectus/Communication re Business Combination
2026-02-06 8-K Shareholder vote results · Regulation FD disclosure
2025-08-14 SCHEDULE 13G Statement of Beneficial Ownership

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