SCHEDULE 13G/A

Statement of Beneficial Ownership

AMTECH SYSTEMS INC Filed 2026-02-13 Acc 0001398344-26-003122

Documents 1

SCHEDULE 13G/A Statement of Beneficial Ownership , xslSCHEDULE_13G_X01/primary_doc.xml

Around this filing

2026-08-06 SCHEDULE 13G/A Statement of Beneficial Ownership
2026-02-13 SCHEDULE 13G/A Statement of Beneficial Ownership
2026-01-21 SCHEDULE 13G/A Statement of Beneficial Ownership

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External

SEC EDGAR (opens in new tab)