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SCHEDULE 13G/A

Statement of Beneficial Ownership

AMTECH SYSTEMS INC Filed 2026-08-06 Acc 0001325447-26-000032

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SCHEDULE 13G/A Statement of Beneficial Ownership , xslSCHEDULE_13G_X02/primary_doc.xml

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2026-08-06 SCHEDULE 13G/A Statement of Beneficial Ownership
2026-08-05 4 Options or other derivatives
2026-08-05 4 Options or other derivatives
2026-08-05 4 Options or other derivatives
2026-08-05 8-K Executive or director change
2026-08-05 10-Q Quarterly Report
2026-02-13 SCHEDULE 13G/A Statement of Beneficial Ownership

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