SC 13D/A

Beneficial Ownership Report

AMTECH SYSTEMS INC Filed 2007-07-17 Acc 0000950144-07-006640

Documents 1

SC 13D/A Beneficial Ownership Report , g08401a5sc13dza.htm

Around this filing

2007-10-03 SC 13D/A Beneficial Ownership Report
2007-07-17 SC 13D/A Beneficial Ownership Report
2007-02-16 SC 13D/A Beneficial Ownership Report

Link to a passage

External

SEC EDGAR (opens in new tab)