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SC 13D/A

Beneficial Ownership Report

AMTECH SYSTEMS INC Filed 2007-02-16 Acc 0000950144-07-001371

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SC 13D/A Beneficial Ownership Report , g05594a4sc13dza.htm

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2007-07-17 SC 13D/A Beneficial Ownership Report
2007-02-16 SC 13D/A Beneficial Ownership Report
2007-02-14 10-Q Quarterly Report
2007-02-14 SC 13G Amended Statement of Ownership
2007-02-14 SC 13G Amended Statement of Ownership
2007-02-12 4 10% owner bought 30,946 shares at an average $6.88 ($212,887)
2007-02-12 SC 13D/A Beneficial Ownership Report

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