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SC 13D/A

Beneficial Ownership Report

AMTECH SYSTEMS INC Filed 2011-01-31 Acc 0000950123-11-007237

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SC 13D/A Beneficial Ownership Report , g25946sc13dza.htm

Around this filing

2016-03-18 SC 13D/A Beneficial Ownership Report
2011-02-01 8-K Material agreement
2011-01-31 SC 13D/A Beneficial Ownership Report
2011-01-26 8-K Shareholder vote results
2010-09-28 SC 13D/A Beneficial Ownership Report

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