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SC 13D/A

Beneficial Ownership Report

AMTECH SYSTEMS INC Filed 2006-05-16 Acc 0000926274-06-000140

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SC 13D/A Beneficial Ownership Report , cat-amtech13da1.txt

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2006-06-27 SC 13D/A Beneficial Ownership Report
2006-05-16 SC 13D/A Beneficial Ownership Report
2006-05-16 SC 13D/A Beneficial Ownership Report
2006-05-15 10-Q Quarterly Report
2006-05-15 SC 13D/A Beneficial Ownership Report

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