SCHEDULE 13G

Statement of Beneficial Ownership

AMTECH SYSTEMS INC Filed 2026-10-09 Acc 0000814133-26-000112

Documents 1

SCHEDULE 13G Statement of Beneficial Ownership , xslSCHEDULE_13G_X02/primary_doc.xml

Around this filing

2026-10-09 SCHEDULE 13G Statement of Beneficial Ownership
2026-07-27 SCHEDULE 13G Statement of Beneficial Ownership

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External

SEC EDGAR (opens in new tab)