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CIK 0001113232 · Large accelerated filer

AXCELIS TECHNOLOGIES INC

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Ticker
ACLS
Exchange
Nasdaq
Industry
Special Industry Machinery, NEC
FY end
Dec 31
Incorporated
DE
Entity type
operating
EIN
341818596
Phone
978-787-4000
Business address
108 CHERRY HILL DRIVE, BEVERLY, MA, 01915
  1. 4 Open-market sale Director sold 1,200 shares at $114.42 ($137,304)
  2. 4 Shares withheld for taxes EVP, CORPORATE MKTG & STRATEGY gave up 743 shares (to pay taxes)
  3. 4 Shares withheld for taxes PRESIDENT AND CEO gave up 905 shares (to pay taxes)
  4. 4 Shares withheld for taxes EXECUTIVE VP, HR/LEGAL AND GEN gave up 872 shares (to pay taxes)
  5. 4 Shares withheld for taxes PRESIDENT AND CEO gave up 3,384 shares (to pay taxes)
  6. 4 Shares withheld for taxes EVP MARKETING AND APPLICATIONS gave up 367 shares (to pay taxes)
  7. 4 Shares withheld for taxes EVP, CORPORATE MKTG & STRATEGY gave up 1,653 shares (to pay taxes)
  8. 4 Shares withheld for taxes EXECUTIVE VP, HR/LEGAL AND GEN gave up 1,945 shares (to pay taxes)
  9. 4 Shares withheld for taxes EVP Global Customer Operations gave up 103 shares (to pay taxes)
  10. 4/A Grant or award Director acquired 1,662 shares (grant or award)
  11. 4/A Grant or award Director acquired 1,662 shares (grant or award)
  12. 4/A Grant or award Director acquired 1,662 shares (grant or award)
  13. 4/A Grant or award Director acquired 1,662 shares (grant or award)
  14. 4/A Grant or award Director acquired 1,662 shares (grant or award)
  15. 4/A Grant or award Director acquired 1,662 shares (grant or award)
  16. 4/A Grant or award Director acquired 1,662 shares (grant or award)
  17. 4/A Grant or award Director acquired 1,662 shares (grant or award)
  18. 4 Grant or award EVP, Engineering acquired 5,698 shares (grant or award)
  19. 4 Grant or award EVP AND CFO acquired 9,496 shares (grant or award)
  20. 4 Grant or award Director acquired 1,162 shares (grant or award)

Page 6 of 48 · 950 filings