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CIK 0001113232 · Large accelerated filer

AXCELIS TECHNOLOGIES INC

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Ticker
ACLS
Exchange
Nasdaq
Industry
Special Industry Machinery, NEC
FY end
Dec 31
Incorporated
DE
Entity type
operating
EIN
341818596
Phone
978-787-4000
Business address
108 CHERRY HILL DRIVE, BEVERLY, MA, 01915
  1. 4 Shares withheld for taxes EVP Global Customer Operations gave up 137 shares (to pay taxes)
  2. 4 Shares withheld for taxes EVP MARKETING AND APPLICATIONS gave up 208 shares (to pay taxes)
  3. 4 Shares withheld for taxes EVP, Research, Dev. & Eng. gave up 506 shares (to pay taxes)
  4. 4 Shares withheld for taxes EVP MARKETING AND APPLICATIONS gave up 734 shares (to pay taxes)
  5. 4 Open-market sale Director sold 1,682 shares at $61.93 ($104,166)
  6. 4 Shares withheld for taxes EVP MARKETING AND APPLICATIONS gave up 190 shares (to pay taxes)
  7. 4 Shares withheld for taxes PRESIDENT AND CEO gave up 1,659 shares (to pay taxes)
  8. 4 Shares withheld for taxes EVP Global Customer Operations gave up 515 shares (to pay taxes)
  9. 4 Shares withheld for taxes EVP MARKETING AND APPLICATIONS gave up 386 shares (to pay taxes)
  10. 4 Shares withheld for taxes EVP AND CFO gave up 574 shares (to pay taxes)
  11. 4 Shares withheld for taxes PRESIDENT AND CEO gave up 3,175 shares (to pay taxes)
  12. 4 Shares withheld for taxes EVP, Research, Dev. & Eng. gave up 345 shares (to pay taxes)
  13. 4 Grant or award EVP, General Counsel and Sec'y acquired 14,344 shares (grant or award)
  14. 4 Grant or award Director acquired 3,586 shares (grant or award)
  15. 4 Grant or award Director acquired 3,586 shares (grant or award)
  16. 4 Grant or award Director acquired 3,586 shares (grant or award)
  17. 4 Grant or award Director acquired 3,586 shares (grant or award)
  18. 4 Grant or award Director acquired 3,586 shares (grant or award)
  19. 4 Grant or award Director acquired 3,586 shares (grant or award)
  20. 4 Grant or award Director acquired 3,586 shares (grant or award)

Page 4 of 48 · 950 filings