Initial Statement of Ownership

AXCELIS TECHNOLOGIES INC Filed 2024-12-12 Acc 0001415889-24-029047

Documents 1

2025-12-22 3 Initial Statement of Ownership
2024-12-16 4 EVP, General Counsel and Sec'y acquired 11,440 shares (grant or award)
2024-12-12 3 Initial Statement of Ownership
2024-02-28 3 Initial Statement of Ownership

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