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4/A

Changes in Ownership

AXCELIS TECHNOLOGIES INC Filed 2014-01-29 Acc 0001181431-14-004289

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4/A Changes in Ownership , xslF345X03/rrd400882.xml

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2014-02-04 8-K Results of operations
2014-01-29 4/A Changes in Ownership
2014-01-29 4/A Changes in Ownership
2014-01-29 4/A Changes in Ownership
2014-01-28 SC 13G/A Amended Statement of Ownership

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