Filing

AXCELIS TECHNOLOGIES INC Filed 2011-01-18 Acc 0001181431-11-003919

Documents 1

2011-01-18 4 Changes in Ownership
2011-01-18 3/A 3/A
2011-01-18 3 Initial Statement of Ownership
2011-01-18 8-K Material agreement · Agreement ended · Executive or director change
2007-12-14 3/A 3/A

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