Cite Filings / ACLS / 0001181431-05-003484

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3

Initial Statement of Ownership

AXCELIS TECHNOLOGIES INC Filed 2005-01-19 Acc 0001181431-05-003484

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3 Initial Statement of Ownership , xslF345X02/rrd64489.xml

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2005-05-19 3 Initial Statement of Ownership
2005-01-21 8-K Material agreement
2005-01-19 3 Initial Statement of Ownership
2005-01-19 3 Initial Statement of Ownership
2005-01-19 3 Initial Statement of Ownership

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