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PRE 14A

Proxy Statement (Preliminary)

AXCELIS TECHNOLOGIES INC Filed 2015-03-03 Acc 0001047469-15-001564

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PRE 14A Proxy Statement (Preliminary) , a2223331zpre14a.htm

Around this filing

2016-02-29 PRE 14A Proxy Statement (Preliminary)
2015-03-06 DEFA14A Proxy Materials
2015-03-06 8-K Other events
2015-03-06 SC 13D/A Beneficial Ownership Report
2015-03-03 PRE 14A Proxy Statement (Preliminary)
2015-03-03 DFAN14A Proxy Soliciting Materials
2009-02-20 PRE 14A Proxy Statement (Preliminary)

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