Proxy Statement

AXCELIS TECHNOLOGIES INC Filed 2012-03-23 Acc 0001047469-12-003171

Documents 1

2013-03-26 DEF 14A Proxy Statement
2012-03-26 ARS Annual Report to Security Holders
2012-03-23 DEF 14A Proxy Statement
2012-03-16 4 Executive VP, HR/Legal acquired 116,363 shares (grant or award)
2012-03-16 4 EVP, Operations acquired 120,000 shares (grant or award)
2012-03-16 4 EVP, Prod. Dev., Eng. & Mktg acquired 116,363 shares (grant or award)
2011-03-24 DEF 14A Proxy Statement

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