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SC 13G/A

Amended Statement of Ownership

AXCELIS TECHNOLOGIES INC Filed 2016-02-12 Acc 0000902664-16-005642

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SC 13G/A Amended Statement of Ownership , p16-0419sc13ga.htm

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2016-02-12 SC 13G/A Amended Statement of Ownership
2016-02-12 SC 13G/A Amended Statement of Ownership
2016-02-10 SC 13G Amended Statement of Ownership
2016-01-25 SC 13G/A Amended Statement of Ownership

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